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Research Exposure Equipment Product List

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Experimental and research exposure device

It is a compactly designed manual auto-alignment exposure device (mask aligner).

【Main Features】 - A manual batch exposure device ideal for multi-variety, small-lot production and experiments/research. - Equipped with high-precision auto-alignment and backside alignment functions. - Capable of auto-alignment for cracked substrates. - Achieves space-saving by reducing the footprint. - UV-LED light source can be installed. - Recipe management function. - Operator assistance and log storage using a barcode reader.

  • Other semiconductor manufacturing equipment
  • Research Exposure Equipment

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